Shanghai Glomro Industrial Co., Ltd.
Global MRO Solutions.
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| Microwave generator and system | Operating frequency | 2450MHz |
| Output power | 0.1 ~ 6 kW continuously adjustable | |
| Power stability | better than ±1% (@ rated status) | |
| Output waveguide interface | BJ-26/22 with FD-26/22 standard flange | |
| Power input | 380VAC/50Hz, 3-phase 5-wire, 11kW | |
| Cooling water flow | 18L/min | |
| System standing wave coefficient | VSWR ≤ 1.5 | |
| Microwave leakage | meet the national standards | |
| Microwave vacuum discharge chamber | Size and working mode | Φ200 x 300 (H) TM mode |
| Effective deposition area | Φ50mm | |
| Pressure control range | 0.5KPa~30KPa | |
| Pressure control accuracy | ±15Pa | |
| Vacuum acquisition | Single crystal growth | growth rate of 10-15μm/H, single growth thickness ≥ 1.6mm |
| Single crystal quality | almost no defects under naked eye | |
| Vacuum system | Blowout mode | fill with N2 |
| Ultimate vacuum degree | better than8×10-4Pa | |
| Vacuum leakage rate | ≤10-9pA.m3/s | |
| Pressure rise | 24 hours average pressure rise is less than1Pa/H |
| Gas mass flow system | Accuracy | 2%-100%F.S.,inletpressureis0.2-0.3Mpa |
| Gas type and range | H2(1SLM),CH4(100SCCM),O2(10SCCM),N2(20SCCM) | |
| Sample stage system | Sample stage diameter | Φ60mm,water-cooled; |
| Adjustment range of sample table | 0~15mm | |
| Cavity plate adjustment range | 0~60mm | |
| Substrate temperature measurement | infrared temperature measurement range | 600~1200℃(Infrared temperature measurement) |
| Temperature control precision | temperature control precision±5℃; | |
| Control range of constant temperature area | temperature difference of each point of molybdenum platform≤30℃ | |
| Device interface | Inlet and outlet water | G1"outer wire |
| Gas connection | 1/4"VCR outer wire | |
| Exhaust discharge interface | 3/4"outer wire | |
| Power line | TB4506 | |
| Insulation resistance | ≥5MΩ | |
| Reliability | the continuous and stable working time under normal conditions shall not be less than 24H | |
| Total power supply | 380VAC±5%/50Hz,3phase5wire,13kW | |
| Total cooling water | 34L/min,clean soft water,inlet water temperature is 20℃±5℃;Water pressure is 0.2~0.4MPa | |
| Dimensions | ~1.95(L)x0.8(W)x1.90(H)m | |
